| Gas mixture | Ar/CO2 70%/30% |
| Total volume | 3,7m^3 |
| Total nom. circulation flow | ~ 3.2 m3/h |
| Max. circulation flow: | ~ 5.0 m3/h |
| Nominal replenishing flow | ~ 0.1 to 0.2 m3/h |
| Max. replenishing flow | 0.8 m3/h |
| Chamber pressure | 0.5 - 2.0 mbar |
| Hydrostatic Diff. | ~ 0.5 mbar |
| Max. overpressure | 5 mbar |
| No. of Channels | 36 |
| No. of Sub-Dis. Units | 2 |
| No. of UX Racks | 2 |
| Impurities | O2 < 100ppm; H2O < 100 ppm |