National Institute for Subatomic Physics

Facilities (equipment) at Nikhef´s Mechanical Workshop

A summary of the most important equipment in the department is given below; the department also has many specialised machines that are not stated on this list.

Material processing:
- CNC milling up to 2000 x 700 x 1000 mm
- CNC turning up to 160 x 655 mm, traditional turning up to 575 x 1500 mm
- bending and shearing up to 2400 mm length and 3 mm thickness
- various welding devices (orbital, point, plasma, mig and tig) up to 480 ampere
- punching, throat 500 mm
- various ovens up to 1500 x 1500 x 1500 mm and 1250° Celsius
- tapping machines from m1 upwards

- 3-D measurement up to 1200 x 2000 x 1000 mm

For the processing of wafers and other micoelectronics:
- Bonding; Delvotec 6320, Hesse and Knipps BJ820 and Mech-El 907
- Phenom electron microscope
- Buehler IsoMet 4000 Dicing Saw
- Buehler Beta cutting and polishing machine.
- March PX-250 Plasma Cleaner
- Dage 4000 Pull/Shear tester
- Pull Tester Royce 220
- 200 mm Wafer tester
- Various optical microscopes
- Pick an Placer Cammax Precima DB 600

Nikhef has a total of 13 cleanrooms up to class 1.000 with a surface area of up to 170 m2. Several of these cleanrooms are also equipped with highly accurate climate control (temperature and humidity). Nikhef also cooperates with the commercial sector on prototypes and production lines for new developments.